Small-scale PVD system

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Other [16]
Pumps & Vacuum Equipment [1]

contact datails

Sinovac Technology Limited

Zhongshan Torch Hi-Tech Industrial Development Zone, Zhongshan City, Guangdong, China.

86-760-8282173

Larger photo of Small-scale PVD system

Small-scale PVD system


company	Sinovac Technology Limited
Categories	Other Pressure Measuring Instruments
Update	2008-06-20
Original Region	China
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Small-scale PVD system

The coating system was specially designed for middle size products functional coating purposes with high productivity. The vacuum chamber unit has a cylinder design with one door opened on the front of the process chamber and 6 (six) cathode Arc Ion Sources.The system is supplied with all necessary manifolds, valves, traps, controls, vacuum gauges and piping to achieve operating vacuum pressure.The pumping system is controlled through the PLC supplied with the equipment. All necessary information to the vacuum system is displayed on a colored PLC touch screen.Inner size of the chamber --- Diameter: 600¡«800mm; Height: 600mm¡«1000mm
Vacuum pumping system --- Oil diffusion pump + Roo

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Middle-scale PVD system

Small-scale PVD system

TRIVAC C Series Rotary Vane Pump